| Fossa - Scroll Vacuum Pumps |
| |
| 5 - 30
m3/h (50 Hz) |
| 6 - 36 m3/h
(60 Hz) |
| 0,01 -
0,075 hPa (mbar) |
| |
 |
Fossa spiral vacuum pumps can achieve a high vacuum.
The seal is fully free of any lubricant, sealing or gear oil.
- powerful
- maintenance-free
- reliable
- application-oriented
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Fossa FO |
|
FO 0009 B |
FO 0018 C
|
FO 0030 B |
|
Nominal displacement [m3/h]] |
|
9 |
18 |
30 |
|
Ultimate pressure [hPa (mbar)] |
|
0.075 |
0.025 |
0.01 |
|
Nominal motor rating [kW] |
|
0,20 |
0,37 |
0,6 |
|
| To receive more information on Fossa scroll vacuum pumps -
Please click here
To find out more
about our products for semiconductor industry applications, please
visit
the website of Busch Semiconductor Vacuum Group:
www.buschsvg.com |
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©2000-2002 Dr.-Ing. K. Busch GmbH |
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